Nanoscale patterning and welding by solvent-free dry particle spray and focused ion beam

Nanoscale ripples on polymers created by a focused ion beam.

We show that focused ion beam irradiation results in the creation of peculiar one- and two-dimensional nanoscale features on the surface of polyimide-a common polymer in electronics, large scale structures, and the automobile industry, as well as in biomedical applications. The role of ion beam incident angle, acceleration voltage, and fluence on the morphology of the structural features is sys...

Nanometer scale patterning using focused ion beam milling

Publisher's copyright statement: Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in (Petit, D. and Faulkner, C. C. and Johnstone, S. and Wood, D. and Cowburn, R. P. (2005) Nanometer scale patterning using focused ion be...

Fabrication and thermal annealing behavior of nanoscale ripple fabricated by focused ion beam

The development, during annealing, of periodic one-dimensional ripple structure has been investigated. The nanoscale ripple array was fabricated on silicon(0 0 1) crystal surface using focused ion beam (FIB). Annealing was performed isothermally in a flowing argon gas ambient at 670 8C. The morphology of the ripple before and after annealing was analyzed by use of atomic force microscope. The h...

Focused Ion Beam Lithography

Lateral patterning of multilayer InAs/GaAs(001) quantum dot structures by in vacuo focused ion beam.

We report on the effects of patterning and layering on multilayer InAs/GaAs(001) quantum dot structures laterally ordered using an in vacuo focused ion beam. The patterned hole size and lateral pattern spacing affected the quantum dot size and the fidelity of the quantum dots with respect to the lateral patterns. 100% pattern fidelity was retained after six layers of dots for a 9.0 ms focused i...